The EL-FLOW® Metal Sealed series offers reliable and high-precision solutions for measuring and controlling gas flows in applications that require high purity and tightness. These instruments are ideal for use in the semiconductor industry, research and development and other sensitive processes.
With its thermal measurement principle, the series delivers accurate measurements and stable flow control, regardless of the physical properties of the gas. They are also equipped with robust metal seals to ensure exceptional reliability in aggressive environments.
Features & benefits
- Metal seal: For optimum cleanliness and tightness in critical applications.
- High precision: Accurate measurement and stable flow control even at low flows.
- Compact design: Easy to integrate into systems with limited space.
- Flexible options: Adaptable to different applications and gases.
- Withstands high pressure: Designed to withstand up to 100 bar.
Applications
- Semiconductor production: For accurate gas delivery in critical processes.
- Research and development: Precision for scientific experiments and laboratory environments.
- Medical technology: Controlled gas distribution in sensitive medical applications.
- Industrial processes: High performance in gas flow control for production and testing.
Model overview:
| Model name | Product description | Min. flow rate | Max. flow rate | Pressure (Pressure / ΔP) | Characteristics |
|---|---|---|---|---|---|
| F-111CM | Metal Sealed Mass Flow Meter for Gases | 0.12...6 mln/min | 1...50 ln/min | 100 bar | Metal-to-metal outer seals, cleanroom assembled |
| F-201CM | Metal Sealed Mass Flow Controller for Gases | 0.12...6 mln/min | 1...50 ln/min | 64 bar | Metal-to-metal outer seals, cleanroom assembled |
